nano-Si can be used to produce polysilicon, organosilicon polymers, and can also replace nano-carbon powder or graphite as anode materials for lithium-ion batteries; this dataset includes primary raw materials, auxiliary materials, energy sources, atmospheric emissions, and waste from the production process. The production equipment manufacturing, plant construction, and other infrastructures are not included within the boundary of the dataset. The data inventory is formed through the consolidation of data from multiple sources. The production of nano-Si adopts an electrothermal process, which means using electric power as a heat source and carbon as a reductant in a semi-closed electric reduction furnace. It includes the processes of raw material preparation, electric furnace smelting, refining and casting, and final product crushing.