Zinc oxide planar targets are commonly used in optoelectronics and semiconductor fields; this dataset includes the primary raw materials, auxiliary materials, energy, atmospheric emissions, water emissions, and waste from the production process. Infrastructure such as the manufacturing of production equipment and construction of plant buildings are not within the boundary of the dataset. The data is derived from literature. The production process for zinc oxide planar targets includes procedures such as vacuum distillation reduction, smelting, ingot casting, hot rolling, hot isostatic pressing, machining, inspection, cleaning, and polishing.