Copper-sodium planar targets are crucial materials in the thin film physical vapor deposition process; this dataset includes the primary raw materials, auxiliary materials, energy sources, atmospheric emissions, water emissions, and waste generated during the production process. The manufacturing equipment for production, as well as infrastructure such as factory building construction, are not included within the boundaries of the dataset; the data is obtained from literature; the production technology of copper-sodium planar targets involves process steps including vacuum distillation reduction, smelting, ingot casting, hot rolling, hot isostatic pressing, machining, inspection, cleaning, and polishing, etc.