Indium planar targets are critical materials in the physical vapor deposition process for thin films; this dataset includes primary raw materials, auxiliaries, energy, atmospheric emissions, water emissions, and wastes from the production process. The manufacturing of production equipment, construction of plant buildings, and other infrastructure are not within the scope of the dataset boundaries. The data were obtained from literature; the production technology of indium planar target includes the main procedures of vacuum distillation reduction, smelting, casting, hot rolling, hot isostatic pressing, machining, inspection, cleaning, and polishing.