N-type monocrystalline silicon wafers can be used in the production of photovoltaic cells. The wafer has an area of approximately 0.033 m², a thickness of 175 μm, and weighs about 17 g. The dataset includes primary raw materials, auxiliary materials, energy inputs, atmospheric emissions, and waste generated during the production process. Infrastructure such as manufacturing equipment and factory construction is excluded from the system boundary of the dataset. The life cycle inventory was compiled from multiple data sources and supplemented and adjusted based on industry statistical data, standards, and emission factor handbooks. It is assumed that the target resistivity of the N-type monocrystalline silicon wafer is 0. 6 Ω·cm, phosphorus dopant estimated according to the standard GB/T 13389-2014; monocrystalline silicon wafers are produced using high-purity polycrystalline silicon as raw material. First, a Czochralski (CZ) process is used to prepare monocrystalline silicon ingots (involving batching, crystal pulling in a monocrystalline furnace, and furnace disassembly and cooling steps). Next, the monocrystalline silicon ingot undergoes squaring processes (including cropping, squaring, lapping, and inspection). Finally, diamond wire sawing is used to slice the squared silicon ingot into wafers (including glue application, slicing, cleaning, and inspection steps).