N-type monocrystalline silicon wafers can be used in the production of photovoltaic cells, with a surface area of approximately 0.044 m² and a weight of about 15.7 g. This dataset includes major raw and auxiliary materials, energy consumption, atmospheric emissions, and waste generated during the production process. Infrastructure such as manufacturing equipment and factory construction is excluded from the system boundary. The life cycle inventory was compiled from multiple data sources and partially adjusted and supplemented by referencing industry statistics, standards, and emission factor handbooks. It is assumed that the target resistivity of the N-type monocrystalline silicon wafer is 0. 6 Ω·cm, phosphorus doping estimated according to standard GB/T 13389-2014; monocrystalline silicon wafers are produced using high-purity polycrystalline silicon as raw material. First, monocrystalline silicon ingots are prepared via the Czochralski (CZ) method (including batching, crystal pulling in a single crystal furnace, and furnace dismantling and cooling). Second, the monocrystalline ingots are processed through a squaring procedure (involving cropping, squaring, lapping, and inspection). Finally, the squared silicon ingots are sliced into wafers using diamond-coated wire (including glue application, slicing, cleaning, and inspection processes).