Electronic-grade silicon wafers are commonly used in integrated circuit or chip manufacturing; the wafer has a diameter of 8 inches and an average surface density of 1687. 26 g/m²; this dataset includes major primary and auxiliary materials, energy, air emissions, and waste from the production process; infrastructure such as manufacturing of production equipment and facility construction is not included within the system boundary of the dataset; the life cycle inventory is compiled from multiple data sources, and the data on raw materials, energy, and various emissions from the wafer foundry process are extrapolated and estimated based on 4-inch wafer foundry production; the wafer manufacturing process includes polished wafer production and wafer outsourcing processing steps; the silicon polished wafer production includes monocrystalline pulling, slicing and grinding, and polishing processes; the wafer outsourcing processing includes wafer cleaning, end diffusion, photolithography, oxidation, and etching. , major processes such as thin film deposition, sintering, and metallization.