High-purity polycrystalline silicon has a purity of up to 99. Purity exceeds 99.99%, suitable for manufacturing solar cells; this dataset includes primary raw and auxiliary material consumption, energy use, atmospheric emissions, waterborne emissions, and waste from production processes. Infrastructure such as production equipment and factory construction is excluded from the system boundaries of the dataset. The life cycle inventory data were compiled from multiple sources and partially corrected and updated based on average photovoltaic industry data from 2023. The upgraded Siemens process involves several stages, including trichlorosilane synthesis, distillation and purification of trichlorosilane, hydrogen reduction of trichlorosilane, tail gas recovery, and hydrogenation and separation of silicon tetrachloride.