The improved Siemens process includes steps such as trichlorosilane synthesis, distillation and purification of trichlorosilane, hydrogen reduction of trichlorosilane, tail gas recovery, and hydrogenation separation of silicon tetrachloride; the silane fluidized bed method involves a process flow including alkaline water electrolysis for hydrogen production, hydrogen purification, cold hydrogenation, silane preparation, granular silicon fluidized bed, and post-treatment.