Copper-sodium planar targets are key materials in the thin-film physical vapor deposition process; this dataset includes major raw materials, auxiliary materials, energy consumption, atmospheric emissions, water emissions, and waste from the production process. Infrastructure such as production equipment manufacturing and facility construction are not included within the system boundary of the dataset; data are sourced from literature. The manufacturing process of copper-sodium planar targets includes procedures such as vacuum distillation reduction, melting, ingot casting, hot rolling, hot isostatic pressing, machining, inspection, cleaning, and polishing.