The chemical formula of sulfur hexafluoride is SF6, CAS number 2551-62-4. It is a colorless, odorless, non-toxic, non-flammable, and non-corrosive inert gas under normal pressure. It has a melting point of -50.8°C and a sublimation point of -63.8°C at atmospheric pressure. Sulfur hexafluoride is chemically stable and does not react with acids, alkalis, salts, ammonia, or water at room temperature, but it decomposes above 500°C, producing toxic and corrosive fumes containing sulfur oxides and fluorine compounds. Sulfur hexafluoride can be used in the power equipment industry, semiconductor manufacturing, refrigeration industry, non-ferrous metal smelting, aerospace, medical equipment (X-ray machines and laser systems), meteorology (tracer analysis), the chemical industry, and other fields. Electronic-grade sulfur hexafluoride is mainly used for etching and cleaning in semiconductor and flat-panel display manufacturing processes.