High-purity polycrystalline silicon with a purity of over 99.9999% is used in the production of solar cells. This dataset includes material inputs, energy consumption, waste, and air emissions associated with production and environmental protection processes (such as slurry treatment, waste gas treatment, and wastewater treatment). Infrastructure such as equipment manufacturing and facility construction is not included within the system boundary of the dataset. The life cycle inventory was compiled from multiple data sources. The process flow for producing granular silicon via the silane fluidized bed method includes hydrogen production via water electrolysis, hydrogen purification, hydrogen drying and regeneration, cold hydrogenation, silane production, granular silicon fluidized bed reactor, and post-treatment processes.