Polycrystalline silicon wafers can be used in the production of photovoltaic cells. They are sliced from silicon ingots into square wafers measuring 156 mm × 156 mm with a surface density of approximately 559 g/m². This dataset includes major raw and auxiliary materials, energy consumption, and waste generated during the production process. Infrastructure such as manufacturing of production equipment and facility construction is not included within the system boundary of the dataset. The life cycle inventory data are sourced from literature. The production process of polycrystalline silicon wafers includes ingot aligning and bonding, wire squaring, slurry mixing, debonding, water washing, chamfering and cropping, ultrasonic cleaning, ingot mounting, wire sawing, wafer cleaning, and testing procedures.